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Honeywell Zephyr™ HAF Series – High Accuracy ±50 SCCM to ±750 SCCM

Overview

Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow.

Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are available at ±50, ±100, ±200, ±400 or ±750 SCCM. Custom flow ranges are also available. The sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).

The HAF Series is compensated over the temperature range of 0 °C to 50 °C [32 °F to 122 °F] and operates across a temperature range of -20 °C to 70 °C [-4 °F to 158 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.

These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow.

Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.

Documents

TITLE DOCUMENT TYPE LANGUAGE SIZE
Honeywell Zephyr™ Analog Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Datasheet English 1MB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Datasheet Datasheet English 1MB
Honeywell Zephyr™ Analog Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions Installation Instructions English 423KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions Installation Instructions English 517KB
Embedded Products in Hospital Applications Brochure English 5MB
Airflow Sensors Line Guide Product Line Guide English 132KB
Airflow, Force, and Pressure Sensors Range Guide Product Range Guide English 885KB
Sensors and Switches for Potential Medical Applications Product Range Guide English 2MB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Product Part Listing/Nomenclature Tree English 81KB
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Application Note English 482KB
I²C Communications with Honeywell Digital Airflow Sensors Technical Note Technical Information English 235KB
Sensors and Switches for Potential Medical Applications Application Note English 842KB
Industrial Product Line Card Line Card/Selection Chart English 571KB
Sensors in Sleep Apnea Machines Application Note English 2MB
Sensors in Ventilators Application Note English 2MB
Gas Media Compatibility and Correction Factors Technical Information English 172KB
Sensors in Anesthesia Machines Application Note English 3MB
Sensors and Switches for Potential Use in HVAC Applications Application Note English 2MB
Airflow Sensor Glossary of Terms Technical Information English 154KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction Technical Information English 85KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions Technical Information English 190KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers Technical Information English 99KB

Browse Honeywell Zephyr™ HAF Series – High Accuracy ±50 SCCM to ±750 SCCM Products

Product Signal Conditioning Compensated Temperature Flow/Pressure Range Media Compatibility
HAFBLF0050C4AX5 Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SCCM to 50 SCCM Dry gas only
HAFBLF0050CAAX5 Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SCCM to 50 SCCM Dry gas only
HAFBLF0200C2AX3 Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SCCM to 200 SCCM Dry gas only
HAFBLF0200C2AX5 Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SCCM to 200 SCCM Dry gas only
HAFBLF0200C4AX3 Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SCCM to 200 SCCM Dry gas only
HAFBLF0200C4AX5 Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SCCM to 200 SCCM Dry gas only
HAFBLF0200CAAX3 Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SCCM to 200 SCCM Dry gas only
HAFBLF0200CAAX5 Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SCCM to 200 SCCM Dry gas only
HAFBLF0750C4AX5 Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SCCM to 750 SCCM Dry gas only
HAFBLF0750CAAX5 Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SCCM to 750 SCCM Dry gas only