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Overview

Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow.

Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM, with custom flow ranges available. The sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).

The HAF Series >10 SLPM is compensated over the calibrated temperature range of 0 °C to 50 °C [32 °F to 122 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.

These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow.

Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.

Documents

TITLE DOCUMENT TYPE LANGUAGE SIZE
Embedded Products in Hospital Applications Brochure English 5MB
Airflow Sensors Line Guide Product Line Guide English 132KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM Datasheet English 1MB
Airflow, Force, and Pressure Sensors Range Guide Product Range Guide English 1MB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM Application Note English 279KB
Sensors and Switches for Potential Medical Applications Product Range Guide English 2MB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM Product Part Listing/Nomenclature Tree English 315KB
Sensors and Switches for Potential Medical Applications Application Note English 883KB
Industrial Product Line Card Line Card/Selection Chart English 571KB
Zephyr™ Digital HAF Series High Accuracy 22 mm OD Tapered Male Fitting CAD Model.stp CAD Model -- 766KB
Zephyr™ Digital HAF Series High Accuracy G 3/8 Threaded Female Fitting CAD Model.stp CAD Model -- 2MB
Zephyr™ Digital HAF Series High Accuracy Manifold Mount CAD Model.stp CAD Model -- 2MB
Sensors in Anesthesia Machines Application Note English 3MB
Sensors in Ventilators Application Note English 2MB
Sensors and Switches for Potential Use in HVAC Applications Application Note English 2MB
Gas Media Compatibility and Correction Factors Technical Information English 172KB
Airflow Sensor Glossary of Terms Technical Information English 154KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction Technical Information English 85KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions Technical Information English 190KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers Technical Information English 99KB

Browse Honeywell Zephyr™ HAF Series – High Accuracy 10 SLPM to 300 SLPM Products

Product Signal Conditioning Compensated Temperature Flow/Pressure Range Media Compatibility
HAFUHH0020L4AXT Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SLPM to 20 SLPM Dry gas only
HAFUHH0050L4AXT Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SLPM to 50 SLPM Dry gas only
HAFUHH0100L4AXT Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SLPM to 100 SLPM Dry gas only
HAFUHH0200L4AXT Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SLPM to 200 SLPM Dry gas only
HAFUHM0010L4AXT Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SLPM to 10 SLPM Dry gas only
HAFUHM0020L4AXT Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SLPM to 20 SLPM Dry gas only
HAFUHM0200L4AXT Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SLPM to 200 SLPM Dry gas only
HAFUHM0300L4AXT Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SLPM to 300 SLPM Dry gas only
HAFUHT0015L4AXT Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SLPM to 15 SLPM Dry gas only
HAFUHT0020L4AXT Amplified 0 °C to 50 °C [32 °F to 122 °F] 0 SLPM to 20 SLPM Dry gas only

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