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Amplified

HAF Series - Low Flow

Compensated. 10 SLPM to 300 SLPM. Digital output.

Overview

Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow.

Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM, with custom flow ranges available. The sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).

The HAF Series >10 SLPM is compensated over the calibrated temperature range of 0 °C to 50 °C [32 °F to 122 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.

These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow.

Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.

Data Sheet
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
application/pdf 1.23 MB
6/16/2022
1.23 MB
Honeywell Zephyr™ Analog Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
application/pdf 1.18 MB
6/16/2022
1.18 MB
Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
application/pdf 1.7 MB
1/3/2022
1.7 MB
Manuals and Guides
Name
Description
File Size
Date
Size
Airflow, Force and Pressure Sensor Product Range Guide
application/pdf 2.78 MB
9/17/2021
2.78 MB
Installation Instructions
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
application/pdf 524.05 KB
6/27/2022
524.05 KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions
application/pdf 524.05 KB
7/15/2021
524.05 KB
Honeywell Zephyrâ„¢ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
application/pdf 526.3 KB
7/15/2021
526.3 KB
CAD Model
Name
Description
File Size
Date
Size
Honeywell Zephyr™ HAF Series - High Accuracy: ±50 SCCM to ±750 SCCM CAD Models
application/zip 1.77 MB
7/27/2022
1.77 MB
Brochure
Name
Description
File Size
Date
Size
Controlling the Future with Technology
application/pdf 11.8 MB
3/7/2023
11.8 MB
Sensors and Switches for Medical Applications
application/pdf 10.15 MB
4/25/2023
10.15 MB
Embedded Products in Hospital Applications
application/pdf 4.7 MB
6/12/2023
4.7 MB
Technical Note
Name
Description
File Size
Date
Size
Energy and Environmental Design Trends
application/pdf 828.15 KB
12/20/2022
828.15 KB
Pressure or Airflow Sensors?
application/pdf 560.47 KB
7/15/2021
560.47 KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
application/pdf 192.45 KB
7/15/2021
192.45 KB
I2C Communications with Honeywell Digital Airflow Sensors Technical Note
application/pdf 237.91 KB
7/15/2021
237.91 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
application/pdf 86.49 KB
7/15/2021
86.49 KB
Airflow Sensor Glossary of Terms
application/pdf 156.26 KB
7/15/2021
156.26 KB
Gas Media Compatibility & Correction Factors
application/pdf 146.35 KB
7/15/2021
146.35 KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
application/pdf 100.21 KB
7/15/2021
100.21 KB
Industrial Product Line Card --
application/pdf 2.24 MB
10/25/2022
2.24 MB
Catalog
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, �50 SCCM to �750 SCCM
application/pdf 82.4 KB
7/15/2021
82.4 KB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
application/postscript 319.61 KB
7/15/2021
319.61 KB
Application Note
Name
Description
File Size
Date
Size
Solutions For Healthier Air & HVAC Systems
application/pdf 3.88 MB
5/31/2022
3.88 MB
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM
application/pdf 488.55 KB
7/15/2021
488.55 KB
Sensors in Anesthesia Machines
application/pdf 2.3 MB
7/15/2021
2.3 MB
Solutions for Ventilators
application/pdf 2.78 MB
6/12/2023
2.78 MB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
application/pdf 282.8 KB
7/15/2021
282.8 KB
Solutions for Laboratory Automation
application/pdf 6.42 MB
6/12/2023
6.42 MB
Sensors and Switches for HVAC Applications
application/pdf 4.51 MB
7/15/2021
4.51 MB
Sensors in Sleep Apnea Machines
application/pdf 1.88 MB
7/15/2021
1.88 MB
Sensors and Switches: Solutions for Medical Applications
application/pdf 1.34 MB
5/18/2023
1.34 MB
Product Photo
Name
Description
File Size
Date
Size
HAF Series - Low Flow Product Photo - grouped
application/zip 328.44 KB
7/15/2021
328.44 KB
Name
Description
File Size
Date
Size
Energy and Environmental Design Trends
828.15 KB
12/20/2022
828.15 KB
Controlling the Future with Technology
11.8 MB
3/7/2023
11.8 MB
Honeywell Zephyr™ HAF Series - High Accuracy: ±50 SCCM to ±750 SCCM CAD Models
1.77 MB
7/27/2022
1.77 MB
Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
524.05 KB
6/27/2022
524.05 KB
Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
1.23 MB
6/16/2022
1.23 MB
Honeywell Zephyr™ Analog Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
1.18 MB
6/16/2022
1.18 MB
Solutions For Healthier Air & HVAC Systems
3.88 MB
5/31/2022
3.88 MB
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM
488.55 KB
7/15/2021
488.55 KB
Pressure or Airflow Sensors?
560.47 KB
7/15/2021
560.47 KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
192.45 KB
7/15/2021
192.45 KB
Sensors in Anesthesia Machines
2.3 MB
7/15/2021
2.3 MB
Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
1.7 MB
1/3/2022
1.7 MB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, �50 SCCM to �750 SCCM
82.4 KB
7/15/2021
82.4 KB
Solutions for Ventilators
2.78 MB
6/12/2023
2.78 MB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
282.8 KB
7/15/2021
282.8 KB
Solutions for Laboratory Automation
6.42 MB
6/12/2023
6.42 MB
I2C Communications with Honeywell Digital Airflow Sensors Technical Note
237.91 KB
7/15/2021
237.91 KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions
524.05 KB
7/15/2021
524.05 KB
Honeywell Zephyrâ„¢ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
526.3 KB
7/15/2021
526.3 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
86.49 KB
7/15/2021
86.49 KB
Sensors and Switches for HVAC Applications
4.51 MB
7/15/2021
4.51 MB
Sensors and Switches for Medical Applications
10.15 MB
4/25/2023
10.15 MB
HAF Series - Low Flow Product Photo - grouped
328.44 KB
7/15/2021
328.44 KB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
319.61 KB
7/15/2021
319.61 KB
Airflow Sensor Glossary of Terms
156.26 KB
7/15/2021
156.26 KB
Embedded Products in Hospital Applications
4.7 MB
6/12/2023
4.7 MB
Gas Media Compatibility & Correction Factors
146.35 KB
7/15/2021
146.35 KB
Sensors in Sleep Apnea Machines
1.88 MB
7/15/2021
1.88 MB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
100.21 KB
7/15/2021
100.21 KB
Industrial Product Line Card --
2.24 MB
10/25/2022
2.24 MB
Airflow, Force and Pressure Sensor Product Range Guide
2.78 MB
9/17/2021
2.78 MB
Sensors and Switches: Solutions for Medical Applications
1.34 MB
5/18/2023
1.34 MB
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
1.23 MB
6/16/2022
Honeywell Zephyr™ Analog Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
1.18 MB
6/16/2022
Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
1.7 MB
1/3/2022
Airflow, Force and Pressure Sensor Product Range Guide
2.78 MB
9/17/2021
Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
524.05 KB
6/27/2022
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions
524.05 KB
7/15/2021
Honeywell Zephyrâ„¢ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
526.3 KB
7/15/2021
Honeywell Zephyr™ HAF Series - High Accuracy: ±50 SCCM to ±750 SCCM CAD Models
1.77 MB
7/27/2022
Controlling the Future with Technology
11.8 MB
3/7/2023
Sensors and Switches for Medical Applications
10.15 MB
4/25/2023
Embedded Products in Hospital Applications
4.7 MB
6/12/2023
Energy and Environmental Design Trends
828.15 KB
12/20/2022
Pressure or Airflow Sensors?
560.47 KB
7/15/2021
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
192.45 KB
7/15/2021
I2C Communications with Honeywell Digital Airflow Sensors Technical Note
237.91 KB
7/15/2021
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
86.49 KB
7/15/2021
Airflow Sensor Glossary of Terms
156.26 KB
7/15/2021
Gas Media Compatibility & Correction Factors
146.35 KB
7/15/2021
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
100.21 KB
7/15/2021
Industrial Product Line Card --
2.24 MB
10/25/2022
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, �50 SCCM to �750 SCCM
82.4 KB
7/15/2021
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
319.61 KB
7/15/2021
Solutions For Healthier Air & HVAC Systems
3.88 MB
5/31/2022
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM
488.55 KB
7/15/2021
Sensors in Anesthesia Machines
2.3 MB
7/15/2021
Solutions for Ventilators
2.78 MB
6/12/2023
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
282.8 KB
7/15/2021
Solutions for Laboratory Automation
6.42 MB
6/12/2023
Sensors and Switches for HVAC Applications
4.51 MB
7/15/2021
Sensors in Sleep Apnea Machines
1.88 MB
7/15/2021
Sensors and Switches: Solutions for Medical Applications
1.34 MB
5/18/2023
HAF Series - Low Flow Product Photo - grouped
328.44 KB
7/15/2021